The UC9 Series incorporates Wasco’s proprietary manufacturing method along with an Elgiloy® diaphragm. It provides ultra high purity and unmatched corrosion resistance. Its all-welded construction eliminates all leak paths. This series is a perfect switch to handle corrosive media with high accuracy and tight tolerance.
We’ve designed these switches for highly corrosive environments found in next generation semiconductor processing equipment. The UC9 series is rated for more than 2,000,000 95B2 application cycles. The UC9 series has materials options available that meet or exceed SEMI F20 UHP requirements. All switches are helium leak tested to ≤ 1 x 10-9 std cc/sec per SEMI F1.
전형적인 적용 분야
Gas Boxes
IGS Gas Panels
Gas Distribution Systems
Valve Manifold Boxes
Etch & Deposition Systems